Force microscope measuring the deflection of the cantilever using a laser beam
(1. optical detector, 2. laser, 3. piezo transducers, 4. cantilever with AFM tip, 5. sample)
(patent application DE 19504855A1)
Force microscope measuring the deflection of the cantilever using a laser beam
(1. optical detector, 2. laser, 3. piezo transducers, 4. cantilever with AFM tip, 5. sample)
(patent application DE 19504855A1)